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Ongoing improvements in semiconductor fabrication productivity are responsible for lowering the cost/functionality ratio of ICs over the years. Sensys Instruments approached Function Engineering to help develop an advanced, high-speed optical metrology system which could be adapted for multiple applications.
Function Engineering developed a robotic system for inspecting wafers under water using precise pneumatic movements to avoid bubbles. Other design components included clean room design, submersion in DI water, chemical inertness of system materials, quartz window for laser inspection, plus all activation sensors and switches to control movement.
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