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Automation is crucial to the competitive semiconductor industry which must deliver ever more powerful chips within increasingly short product lifecycles. Maximizing throughput and minimizing operator intervention are of key importance.
Function Engineering developed a highly-automated wafer handler for KLA-Tencor that met clean room requirements. Design activities included kinematic docking designs, air filtration design, robot packaging, frame weldment, and sheet metal skin design. The handler was a module that was adopted into KLA-Tencor's new product line.
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